FQCW266-600 High Power UV Laser
High-Power 266 nm Laser with 600 mW Output for Maximum Precision
The FQCW266-600 – a high-power UV laser, stands for exceptional stability, efficiency, and longevity in the UV range. With a central wavelength of 266 nm and an output power of 600 mW, this laser delivers outstanding performance for demanding applications in both industry and research.
Upgrade Capability
The FQCW266 – High Power UV Laser platform allows for flexible performance adjustments during refurbishment. As a result, the FQCW266-600 can be upgraded from 600 mW to the next higher power level of 1,200 mW.
This provides maximum investment security and adaptability to changing demands in both industry and research.
Longevity & Easy Maintenance
The integrated Automatic Crystal Shifter (ACS) optimally utilizes the conversion crystal – significantly increasing lifespan and extending the maintenance interval to up to 16,000 operating hours.
Thanks to the air-cooled aluminum housing, no water cooling circuit is required.
For operation, a purge at the exit window with CDA (Clean Dry Air) or nitrogen (N₂) is sufficient – no internal gas management is needed.
Smart Control & Connectivity
Control the FQCW266 laser as needed:
- Manually at the push of a button
- Software-controlled via our control interface
- Externally via RS232, USB, or Ethernet
Designed for Continuous Operation
The FQCW266 – High Power UV Laser Series is designed for 24/7 applications in industrial environments – ideal for OEM customers in semiconductor manufacturing or high-precision research applications.
With a typical warm-up time of just 30 minutes and an average power consumption of 200 W, it impresses with efficiency and reliability at low operating cost.
Technical data:
| Wavelength | 266 ± 0.05 nm |
| Output Power, Nominal | 600 mW ± 5 % |
| Output power, Adjustability | 60 mW to 600 mW |
| Line Width | < 300 kHz |
| Beam Propagation Factor M² (Average) | < 1.3, TEM00 |
| Beam Propagation Factor M²x (Horizontal) | < 1.2, TEM00 |
| Beam Propagation Factor M²y (Vertical) | < 1.35, TEM00 |
| Polarisation Orientation and Purity | Vertical, > 500:1 |
| Beam Diameter | 1.1 ± 0.3 mm |
| Beam divergence | < 0.45 mrad |
| Static Alignment Tolerance(1) | Lateral ± 0.25 mm | angular ± 2.5 mrad |
| Spot-to-Spot Beam Pointing Variation(2) | ± 225 μrad |
| Power Stability (0.5 Hz over 8 h) | < 0.2 % rms |
| Power Noise (1 Hz – 100 kHz) | < 1 % rms |
| Power Noise (100 kHz – 250 MHz) | < 0.2 % rms |
(1) Position and angle of static alignment tolerances are specified with regard to laser beam exit.
(2) Refers to adjacent spots on non-linear UV crystal.
| Typical UV Crystal Spot Lifetime | 2,000 hours |
| Typical Lifetime (before First Service) | 16,000 hours |
| Power Consumption Mean (Max) | < 200 W (450 W) |
| Line Voltage | 90 to 250 V AC (50 to 60 Hz) |
| Communication Interfaces | USB | RS232 | Ethernet |
| Safety features | Key Switch | Interlock | Electrical Shutter |
| Warm-up time (Max) (3) | 30 min (45 min) |
| Operating Temperature (Laser Head) | 20 °C to 25 °C non-condensing |
| Cooling via Bearing Surface, Required Thermal Resistance (4) |
1/40 K/W @ 25 °C | 1/20 K/W @ 20 °C Cooling Surface |
| Laser Head Dimensions | < 120 x 310 x 715 mm³ (H x W x L) |
| Control Unit Dimensions | < 184 x 483 x 411 mm³ (H x W x L) |
| Laser Head Weight | < 36 kg |
| Controller Unit Weight | < 12 kg |
(3) Warm-up in the temperature range 20 – 25 °C, temperature change < 1 K/h. (4) Different cooling options (e.g. air flow, water cooling) available upon request.
| Purge Supply for Laser Exit Window | Flow 0.5 l/min CDA, SH < 10 PPM or N2 (Purity Grade 5.0 “Scientific” or Better) |




